- Journal
- PLASMA PROCESSES AND POLYMERS
- Année
- 2007
- Volume
- 4
- Numéro
- 1
- Pages
- S588-S592
- Mois
- APR
- DOI
- 10.1002/ppap.200731411
Abstract
The possibilities offered by magnetron sputtering to obtain Si and Cr enriched (Ti-x,Al-y)N coatings are presented, correlating coatings properties to the deposition parameters. After a theoretical study of the sputtering conditions, the coatings deposition was achieved using a TiAl (50-50 at%) target, with Cr and Si inserts distributed onto its erosion track in order to reach the desired composition. Composition and structural evolution were determined by means of GDOES and XRD. Oxidation resistance of the coatings, as a function of structure and composition, was tested at 900 degrees C. Mechanical tests were performed by means of unidirectional multi-pass scratch testing under constant load showing interesting performances.